KOUAKOU, P.; YOBOUE, P.; OUATTARA, B.; HODY, V.; CHOQUET, P.; BELMAHI, M. Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation. Journal of Surface Science and Technology, [S. l.], v. 33, n. 1-2, p. 44–52, 2017. DOI: 10.18311/jsst/2017/11022. Disponível em: http://informaticsjournals.com/index.php/jsst/article/view/11022. Acesso em: 28 apr. 2024.