BASKAR, S.; GOURBILLEAU, F.; PRATIBHA NALINI, R. Synthesis and Characterization of a-Si<sub>x</sub>C<sub>y</sub> Thin Films Prepared by RF Magnetron Co-Sputtering Technique. Journal of Surface Science and Technology, [S. l.], v. 35, n. 3-4, p. 107–113, 2020. DOI: 10.18311/jsst/2019/20961. Disponível em: http://informaticsjournals.com/index.php/jsst/article/view/20961. Acesso em: 28 apr. 2024.