P. Kouakou, P. Yoboue, B. Ouattara, V. Hody, P. Choquet, and M. Belmahi, “Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation”, JSST, vol. 33, no. 1-2, pp. 44–52, Jul. 2017.