Kouakou, P., P. Yoboue, B. Ouattara, V. Hody, P. Choquet, and M. Belmahi. “Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation”. Journal of Surface Science and Technology 33, no. 1-2 (July 24, 2017): 44–52. Accessed April 28, 2024. http://informaticsjournals.com/index.php/jsst/article/view/11022.