NASKAR, S. K.; MANDAL, N. K. Micro Electro Mechanical System: - A New Challenge in Mechanical Engineering. Indian Science Cruiser, [S. l.], v. 17, n. 3, p. 22–28, 2003. Disponível em: https://informaticsjournals.com/index.php/ISC/article/view/42239. Acesso em: 1 jun. 2024.